Structures including multiple carbon layers and methods of forming and using same

ABSTRACT

Methods and systems for forming a structure including multiple carbon layers and structures formed using the method or system are disclosed. Exemplary methods include forming a first carbon layer and a second carbon layer, wherein a density and/or other property of the first carbon layer differs from the corresponding property of the second carbon layer.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application claims the benefit of U.S. Provisional Application No. 63/028,366, filed on May 21, 2020, in the United States Patent and Trademark Office, the disclosure of which is incorporated herein in its entirety by reference.

FIELD OF INVENTION

The present disclosure generally relates to methods of forming structures suitable for use in the manufacture of electronic devices. More particularly, examples of the disclosure relate to methods of forming structures that include carbon layers, to structures including such layers, to devices formed using the methods and structures, and to systems for performing the methods and/or forming the structures.

BACKGROUND OF THE DISCLOSURE

During the manufacture of devices, such as semiconductor devices, it is often desirable to fill gaps, also referred to as recesses (e.g., trenches or regions between features), on the surface of a substrate with insulating or dielectric material. Some techniques to fill gaps include the deposition of a layer of carbon material, such as spin on carbon (SOC). For many applications, use of carbon material, such as SOC, has many desirable properties, such as filling capability, etch selectivity, aching efficiency, and the like.

Although use of carbon material to fill gaps can work well for some applications, filling gaps using traditional deposition techniques has several shortcomings, particularly as the size of the gaps to be filled decreases. For example, it may be desirable to obtain a relatively flat surface of the carbon material for subsequent processing, such as photolithography, etching of material, and/or depositing of materials. If a flatness and/or roughness of a surface of the carbon material is not at suitable levels, undesirable variation in critical dimensions (CD) and/or line edge roughness (LER) may result in resist patterns and features that are subsequently formed.

Chemical mechanical polishing (CMP) is often used to flatten and/or smooth a surface of the carbon material—e.g., prior to a photolithography step. However, with traditional carbon layer deposition processes, carbon material with undesirably low flatness may initially form and use of CMP may not provide the desired flatness and/or smoothness.

Further, use of SOC can be relatively expensive, because SOC processes use additional processing equipment, such as coaters and ovens. And, SOC processes generally include additional processing steps, such as coating, baking, and curing. The use of such additional equipment and processing steps can add unwanted time and expense to methods of forming structures used to form devices.

Accordingly, improved methods for forming structures, particularly for methods of filling gaps or recesses on a substrate surface with carbon material, that are suitable for providing relatively flat, smooth surfaces are desired. Further improved structures and devices, as well as systems for forming such structures and devices, are desired.

Any discussion, including discussion of problems and solutions, set forth in this section, has been included in this disclosure solely for the purpose of providing a context for the present disclosure, and should not be taken as an admission that any or all of the discussion was known at the time the invention was made or otherwise constitutes prior art.

SUMMARY OF THE DISCLOSURE

Various embodiments of the present disclosure relate to methods of forming structures suitable for use in the formation of electronic devices, to structures formed using the methods, and to systems for performing the methods. While the ways in which various embodiments of the present disclosure address drawbacks of prior methods, structures, and systems are discussed in more detail below, in general, exemplary embodiments of the disclosure provide improved methods for forming structures that include two or more carbon layers having different properties. Use of the two or more carbon layers in the formation of structures—e.g., to fill recesses—can improve a flatness of the recess fill material, which in turn, can provide for reduced variation in critical dimensions and reduced line edge roughness in features formed using methods described herein, compared to traditional methods.

In accordance with various embodiments of the disclosure, methods of forming a structure are provided. Exemplary methods include providing a substrate within a reaction chamber, forming a first carbon layer overlying the surface, and forming a second carbon layer overlying the first carbon layer. The substrate can include one or more recesses formed on a surface of the substrate. The first and second carbon layers can be used to fill the one or more recesses (e.g., having aspect ratios of about 3.0 to about 100.0) without void formation and to provide a relatively smooth surface for subsequent processing. In accordance with examples of these embodiments, a density of the first carbon layer is higher than a density of the second carbon layer. For example, a density of the first carbon layer can be greater than a density of the second carbon layer by about 10% to about 50%. Exemplary methods can additionally include a step of chemical mechanical polishing. The step of chemical mechanical polishing can be used to remove at least a portion of the second carbon layer. The step of chemical mechanical polishing can also be used to remove at least a portion of the first carbon layer. In accordance with further aspects of these embodiments, the step of forming the first and/or second carbon layer comprises a plasma process. Exemplary methods can include a step of etching the second carbon layer and the first carbon layer. In these cases, the etch can be non-selective, such that the first carbon layer and the second carbon layer are etched at substantially the same rate (e.g., within about 10%, 5%, 2%, or 1%). The steps of etching the first carbon layer and the second carbon layer can include ionic etching. In accordance with yet additional aspects of these embodiments, the method can include forming a third layer overlying the second carbon layer. The third layer can include a third carbon layer. A composition of the third layer can be the same as a composition of the second carbon layer.

In accordance with additional exemplary embodiments of the disclosure, a structure is formed, at least in part, according to a method described herein. A structure can include a first carbon layer and a second carbon layer.

In accordance with yet further exemplary embodiments of the disclosure, a system is provided for performing a method and/or for forming a film structure as described herein. Exemplary systems can include one or more reaction chambers, a carbon precursor source, an inert gas source, a plasma power source, an exhaust source, and a controller. The controller can be configured to control gas flow of the carbon precursor into at least one of the one or more reaction chambers to form a first carbon layer and a second carbon layer overlying the first carbon layer, wherein a density of the first carbon layer is higher than a density of the second carbon layer.

These and other embodiments will become readily apparent to those skilled in the art from the following detailed description of certain embodiments having reference to the attached figures; the invention not being limited to any particular embodiment(s) disclosed.

BRIEF DESCRIPTION OF THE DRAWING FIGURES

A more complete understanding of exemplary embodiments of the present disclosure can be derived by referring to the detailed description and claims when considered in connection with the following illustrative figures.

FIG. 1 illustrates a method in accordance with exemplary embodiments of the disclosure.

FIG. 2 illustrates a method in accordance with exemplary embodiments of the disclosure.

FIGS. 3-6 illustrate structures in accordance with exemplary embodiments of the disclosure.

FIG. 7 illustrates additional structures in accordance with exemplary embodiments of the disclosure in comparison to other structures.

FIGS. 8, 9, and 11 illustrate a timing sequence diagrams in accordance with exemplary embodiments of the disclosure.

FIG. 10 illustrates a system in accordance with exemplary embodiments of the disclosure.

It will be appreciated that elements in the figures are illustrated for simplicity and clarity and have not necessarily been drawn to scale. For example, the dimensions of some of the elements in the figures may be exaggerated relative to other elements to help improve understanding of illustrated embodiments of the present disclosure.

DETAILED DESCRIPTION OF EXEMPLARY EMBODIMENTS

Although certain embodiments and examples are disclosed below, it will be understood by those in the art that the invention extends beyond the specifically disclosed embodiments and/or uses of the invention and obvious modifications and equivalents thereof. Thus, it is intended that the scope of the invention disclosed should not be limited by the particular disclosed embodiments described below.

The present disclosure generally relates to methods of forming structures, to structures formed using the methods, and to systems for performing the methods and/or forming the structures. By way of examples, the methods described herein can be used to fill recesses or gaps (e.g., trenches or vias or spaces between features, such as lines or protrusions) on a surface of a substrate with carbon material.

Exemplary methods include forming two or more carbon layers having different properties (e.g., hardness, modulus, polishing rate, and/or density). Use of multiple carbon layers, in which at least two layers exhibit different properties, can provide for desired recess fill properties, while also providing desired polishing (e.g., chemical mechanical polishing) and/or etching properties of the carbon material. Further, structures formed using the two or more carbon layers can exhibit a relatively flat, smooth surface—e.g., after polishing and/or etching—which is suitable for subsequent processing, such as photoresist patterning, etching, and the like. The relatively flat, smooth surfaces of the structures can result in patterning with reduced critical dimension (CD) variation and/or reduced line edge roughness (LER) in patterned resist and/or of features formed on the surface of the structure.

Carbon layers that are relatively less dense may be desirable for polishing (e.g., CMP). The density of carbon layers can be generally related to a modulus or polishing rate of the carbon layer. High polishing rates generally allow higher device manufacturing throughput. On the other hand, the relatively less dense carbon layers may not be suitable for use as a mask during subsequent etching processes, because the relatively less dense carbon layers may not be stable during the etch process, resulting in features with relatively high variation in CD and/or LER. Use of two carbon layers can provide desired polishing rates, while also providing a carbon layer with a relatively high density for pattern transfer.

In this disclosure, “gas” can refer to material that is a gas at normal temperature and pressure, a vaporized solid and/or a vaporized liquid, and may be constituted by a single gas or a mixture of gases, depending on the context. A gas other than a process gas, i.e., a gas introduced without passing through a gas distribution assembly, such as a showerhead, other gas distribution device, or the like, may be used for, e.g., sealing a reaction space, which includes a seal gas, such as a rare gas. In some cases, such as in the context of deposition of material, the term “precursor” can refer to a compound that participates in the chemical reaction that produces another compound, and particularly to a compound that constitutes a film matrix or a main skeleton of a film, whereas the term “reactant” can refer to a compound, in some cases other than a precursor, that activates a precursor, modifies a precursor, or catalyzes a reaction of a precursor; a reactant may provide an element (such as O, H, N, C) to a film matrix and become a part of the film matrix when, for example, power (e.g., radio frequency (RF) power) is applied. In some cases, the terms precursor and reactant can be used interchangeably. The term “inert gas” refers to a gas that does not take part in a chemical reaction to an appreciable extent and/or a gas that excites a precursor (e.g., to facilitate polymerization of the precursor) when, for example, power (e.g., RF power) is applied, but unlike a reactant, it may not become a part of a film matrix to an appreciable extent.

As used herein, the term “substrate” can refer to any underlying material or materials that may be used to form, or upon which, a device, a circuit, or a film may be formed. A substrate can include a bulk material, such as silicon (e.g., single-crystal silicon), other Group IV materials, such as germanium, or compound semiconductor materials, such as Group III-V or Group II-VI semiconductors, and can include one or more layers overlying or underlying the bulk material. Further, the substrate can include various features, such as gaps, lines, or protrusions, such as lines having gaps formed therebetween, and the like formed on or within or on at least a portion of a layer or bulk material of the substrate. By way of examples, one or more features (e.g., recesses, line, or protrusions) can have a width of about 10 nm to about 100 nm, a depth or height of about 30 nm to about 1,000 nm, and/or an aspect ratio of about 3.0 to 100.0.

In some embodiments, “film” refers to a layer extending in a direction perpendicular to a thickness direction. In some embodiments, “layer” refers to a material having a certain thickness formed on a surface and can be a synonym of a film or a non-film structure. A film or layer may be constituted by a discrete single film or layer having certain characteristics or multiple films or layers, and a boundary between adjacent films or layers may or may not be clear and may or may not be established based on physical, chemical, and/or any other characteristics, formation processes or sequence, and/or functions or purposes of the adjacent films or layers. The layer or film can be continuous—or not. Further, a single film or layer can be formed using multiple deposition cycles and/or multiple deposition and treatment cycles.

As used herein, the term “carbon layer” can refer to a layer whose chemical formula can be represented as including carbon. Layers comprising carbon material can include other elements, such as one or more of nitrogen and hydrogen. Similarly, the term “carbon material” can refer to a material whose chemical formula can be represented as including carbon. Carbon material can include one or more carbon layers.

As used herein, the term “structure” can refer to a partially or completely fabricated device structure. By way of examples, a structure can be a substrate or include a substrate with one or more layers and/or features formed thereon.

As used herein, the term “cyclic deposition process” can refer to a vapor deposition process in which deposition cycles, typically a plurality of consecutive deposition cycles, are conducted in a process chamber. Cyclic deposition processes can include cyclic chemical vapor deposition (CVD) and atomic layer deposition processes. A cyclic deposition process can include one or more cycles that include (e.g., pulses of) plasma activation of a precursor, a reactant, and/or an inert gas and/or pulses of a precursor to a reaction chamber.

In this disclosure, “continuously” can refer to without breaking a vacuum, without interruption as a timeline, without any material intervening step, without changing treatment conditions, immediately thereafter, as a next step, or without an intervening discrete physical or chemical structure between two structures other than the two structures in some embodiments and depending on the context.

A flowability (e.g., an initial flowability) can be determined as follows:

TABLE 1 bottom/top ratio (B/T) Flowability 0 < B/T < 1 None   1 ≤ B/T < 1.5 Poor 1.5 ≤ B/T < 2.5 Good 2.5 ≤ B/T < 3.5 Very good 3.5 ≤ B/T Extremely good where B/T refers to a ratio of thickness of film deposited at a bottom of a recess to thickness of film deposited on a top surface where the recess is formed, before the recess is filled. Typically, the flowability is evaluated using a wide recess having an aspect ratio of about 1 or less, since generally, the higher the aspect ratio of the recess, the higher the B/T ratio becomes. The B/T ratio generally becomes higher when the aspect ratio of the recess is higher. As used herein, a “flowable” film or material exhibits good or better flowability.

As set forth in more detail below, flowability of film can be obtained when a volatile hydrocarbon precursor, for example, is polymerized by a plasma and deposits on a surface of a substrate, wherein the gaseous precursor is activated or fragmented by energy provided by plasma gas discharge, so as to initiate polymerization. The resultant polymer material can exhibit temporarily flowable behavior. When a deposition step is complete and/or after a short period of time (e.g., about 3.0 seconds), the film may no longer be flowable, but rather becomes solidified, and thus, a separate solidification process may not be employed.

In this disclosure, any two numbers of a variable can constitute a workable range of the variable, and any ranges indicated may include or exclude the endpoints. Additionally, any values of variables indicated (regardless of whether they are indicated with “about” or not) may refer to precise values or approximate values and include equivalents, and may refer to average, median, representative, majority, etc. in some embodiments. Further, in this disclosure, the terms “including,” “constituted by” and “having” can refer independently to “typically or broadly comprising,” “comprising,” “consisting essentially of,” or “consisting of” in some embodiments. In this disclosure, any defined meanings do not necessarily exclude ordinary and customary meanings in some embodiments.

Turning now to the figures, FIG. 1 illustrates an exemplary method 100 in accordance with examples of the disclosure. Method 100 includes the steps of providing a substrate within a reaction chamber (step 102), forming a first carbon layer (step 104), and forming a second carbon layer (step 106). As further illustrated, method 100 can optionally include one or more of the steps of etching one or more of the second carbon layer and the first carbon layer (step 108) and/or polishing (e.g., chemical mechanical polishing) (step 110).

During step 102 of providing a substrate within a reaction chamber, the substrate is provided into a reaction chamber of a gas-phase reactor. In accordance with examples of the disclosure, the reaction chamber can form part of a cyclical deposition reactor, such as an atomic layer deposition (ALD) (e.g., a plasma enhanced ALD (PEALD)) reactor or chemical vapor deposition (CVD) (e.g., a plasma enhanced CVD (PECVD)) reactor. Various steps of methods described herein can be performed within a single reaction chamber or can be performed in multiple reaction chambers, such as reaction chambers of a cluster tool.

During step 102, the substrate can be brought to a desired temperature and/or the reaction chamber can be brought to a desired pressure, such as a temperature and/or pressure suitable for subsequent steps. By way of examples, a temperature (e.g., of a substrate or a substrate support) within a reaction chamber can be less than or equal to 100° C. A pressure within the reaction chamber can be from about 200 Pa to about 1,250 Pa. In accordance with particular examples of the disclosure, the substrate includes one or more features. In some cases, the features can extend from a surface of the substrate. In these cases, a recess can be formed between the features.

With reference to FIGS. 1 and 3 , during step 104, a first carbon layer 304 is formed overlying a surface of a substrate 302 to form a structure 300. As illustrated, substrate 302 can include features 306 and 308 and a recess 310 formed therebetween. A height of the first carbon layer 304 relative to the surface of the substrate can be greater than a height of features 306, 308 relative to the surface substrate.

FIG. 2 illustrates an exemplary method 200 of forming a carbon layer—e.g., a first, second, or third carbon as described herein. Method 200 can be used for step 104 and/or step 106 of method 100.

Method 200 includes the steps of providing a carbon precursor to the reaction chamber (step 202), providing a plasma within the reaction chamber (step 204), and a treatment step (206). In addition, method 200 can include providing one or more inert gases to the reaction chamber and/or providing one or more reactant gases to the reaction chamber.

The one or more inert gases can include, for example, one or more of argon, helium, and nitrogen, in any combination. By way of particular examples, the inert gas is or includes helium. A flowrate of the inert gas to the reaction chamber during this step can be from about 500 sccm to about 8,000 sccm. The inert gas can be used to ignite a plasma or facilitate ignition of the plasma within the reaction chamber, to purge reactants and/or byproducts from the reaction chamber, and/or be used as a carrier gas to assist with delivery of the precursor to the reaction chamber. A power used to ignite and maintain the plasma can range from about 50 W to about 800 W. A frequency of the power can range from about 2.0 MHz to about 27.12 MHz.

During step 202, a carbon precursor for forming a carbon layer is introduced into the reaction chamber. Exemplary precursors include compounds represented by the formula C_(x)H_(y)N_(z), where x is a natural number greater than or equal to 2, y is a natural number, and z is zero or a natural number. For example, x can range from about 2 to about 15, y can range from about 4 to about 30, and z can range from about 0 to about 10. The precursor can include a chain or cyclic molecule having two or more carbon atoms and one or more hydrogen atoms, such as molecules represented by the formula above. By way of particular examples, the precursor can be or include one or more cyclic (e.g., aromatic) structures and/or compounds having at least one double bond, and in some cases including two or more or three or more double bonds. By way of particular examples, the carbon precursor can be or include 1,3,5, trimethylbenzene or 2,4,6, trimethylpyridine.

A flowrate of the carbon precursor from a carbon precursor source to the reaction chamber can vary according to other process conditions. By way of examples, the flowrate can be from about 100 sccm to about 3,000 sccm. Similarly, a duration of each step of providing a carbon precursor to the reaction chamber can vary, depending on various considerations. By way of examples, the duration can range from about 1.0 seconds to about 35.0 seconds.

With continued reference to FIG. 2 , during step 204, a plasma is formed within the reaction chamber to form an initially viscous carbon material on a surface of the substrate. Once the carbon precursor is provided to the reaction chamber and a plasma is formed, the carbon precursor is converted into the initially viscous (flowable) material using excited species. The initially viscous carbon material can become a carbon layer—e.g., through further reaction with excited species. The carbon layer can be solid or substantially solid.

During step 206, the carbon layer can be treated with activated species to form, for example, increased density and/or hardness of the carbon layer. Step 206 can include forming species from an inert gas, such as the inert gas provided during the step of providing an inert gas to the reaction chamber. A power used to form the plasma can range from about 50 W to about 800 W. A frequency of the power can range from about 2.0 MHz to about 27.12 MHz.

During step 206, activated species can be formed by using a plasma (e.g., radio frequency and/or microwave plasma). A direct plasma and/or a remote plasma can be used to form the activated species.

In some cases, an inert gas can be continuously flowed to the reaction chamber and activated species can be periodically formed by cycling the power used to form the plasma. The species formation for treatment step can be formed in the same reaction chamber used for one or more or other steps or can be a separate reaction chamber, such as another reaction chamber of the same cluster tool.

A temperature within a reaction chamber during steps 202-206 can be less than or equal to 100° C. A pressure within a reaction chamber during the species formation for treatment can be from about 200 Pa to about 1,250 Pa.

Steps of various methods described herein can overlap and need not be performed in the order noted above. For example, the order steps 202 and 204 can be reversed. Further, in some cases, various steps or portions thereof can be repeated one or more times prior to a method proceeding to the next step. For example, steps 202 and 204 can be repeated one or more times—e.g., about 01 to about 20 times (loop 208) prior to method 200 proceeding to step 206. Similarly, steps 202-206 (with or without repeating loop 208) can be repeated a number of times prior to proceeding to the next step (e.g., the next step of method 100).

FIGS. 8, 9 and 11 illustrate exemplary timing sequence diagrams suitable for use with method 200. FIGS. 8, 9 and 11 illustrate inert gas, carbon precursor, and plasma power pulses, where gases and/or plasma power are provided to a reactor system for a pulse period. A width of the pulses may not necessarily be indicative of an amount of time associated with each pulse; the illustrated pulses can illustrate relative start times of the various pulses. Similarly, a height of an illustrated pulse may not necessarily be indicative of a specific amplitude or value, but can show relative high and low (e.g., on and off) values. These examples are merely illustrative and are not meant to limit the scope of the disclosure or claims.

FIG. 8 illustrates a sequence 800 suitable for use as method 200. Sequence 800 can include one or more carbon material deposition steps 802 (n) and one or more treatment steps 804. In accordance with examples of these embodiments, n can range from about 1 to about 50 and a combination of n deposition cycles and one or more treatment steps can be repeated N times, where N ranges from about 1 to about 50.

As illustrated, sequence 800 can include continuously supplying an inert gas to the reaction chamber during one or more carbon material deposition steps 802 and/or one or more treatment steps 804. In the illustrated example, the inert gas is provided to the reaction chamber for a pulse period 806, which begins prior to a first deposition step 802 and can end after the last treatment step 804. Pulse periods can be referred to simply as pulses.

After pulse period 806 is initiated, a carbon precursor is provided to the reaction chamber for a pulse period 808. Pulse period 808 can range from, for example, about 1.0 seconds to about 35.0 seconds. Each pulse period 808 can be the same or vary in time.

After the flow of the carbon precursor to the reaction chamber has started, power to form a plasma is provided for a pulse period 810. Thus, in the illustrated example, both the inert gas and the carbon precursor have been provided to the reaction chamber when the plasma is ignited/formed. Pulse period 810 can range from, for example, about 1.0 second to about 30.0 seconds. Each pulse period 810 can be the same or vary in time.

As illustrated in this example, pulse period 808 may cease prior to pulse 810. However, in some cases, pulses 808 and 810 can overlap in time. Once the flow of the carbon precursor to the reaction chamber and the plasma power have ceased, the reaction chamber can be purged fora purge period. The purge period can range from, for example, about 5.0 seconds to about 30.0 seconds. Each purge period can be the same or vary in time.

A power (e.g., applied to electrodes) during pulse 810 can range from about 100 W to about 800 W. A frequency of the power can range from about 2.0 MHz to about 27.12 MHz.

After pulse period 810, a plasma power can be increased to a desired level for treating the carbon material with activated species for a pulse period 812. The power level and pressure within the reaction chamber can be as described above. Pulse period 812 can range from, for example, about 1.0 second to about 30.0 seconds. Each pulse period 812 can be the same or vary in time. A power, pulse time, and/or number of pulses during step 804 can vary according to desired carbon layer properties. For example, one or more of the power, pulse time, and/or number of pulses, in any combination, during step 804 may be greater for a first carbon layer relative to the power, pulse time, and/or number of pulses for a second carbon layer.

After the step of treating the carbon material with activated species for one or more pulse periods 812, the reaction chamber can be purged for a second purge period. The second purge period can range from, for example, about 10.0 seconds to about 70.0 seconds. Each second purge period can be the same or vary in time.

FIG. 9 illustrates another sequence 900 suitable for use as method 200. Similar to sequence 800, sequence 900 can include one or more carbon material deposition steps 902 (n) and one or more treatment steps 904. In accordance with examples of these embodiments, n can range from about 1 to about 50 and a combination of n deposition steps with one or more treatments steps can be N, where N ranges from about 1 to about 50.

Sequence 900 can include continuously supplying an inert gas to the reaction chamber during one or more carbon material deposition steps 902 and/or one or more treatment steps 904. In the illustrated example, the inert gas is provided to the reaction chamber for a pulse period 906, which begins prior to a first deposition step 902 and can end after the last treatment step 904.

After pulse period 906 is initiated, power to form a plasma is provided for a pulse period 910. As illustrated, pulse period 906 can begin prior to a first pulse 908 of introducing a carbon precursor to the reaction chamber and continue until the last treatment pulse 904 is completed. The power provided during pulse 910 can begin prior to first pulse 908 and can continue until last treatment step 904. A power level and frequency of plasma pulse 910 can be as described above in connection with pulses 810. Pulses 908 can be the same or similar to pulses 808, described above.

The reaction chamber can be purged after each pulse 908. The purge times can be as described above in connection with first purge periods. After the step of treating the carbon material with activated species, the reaction chamber can be purged for a second purge period. The second purge period can range from, for example, about 10.0 seconds to about 70.0 seconds. Each second purge period can be the same or vary in time.

In some cases, the power and/or frequency used to form a plasma during sequence 900 can be constant, and an amount of time for a treatment step can be used to form carbon layers of different properties (e.g., density, hardness, or the like).

FIG. 11 illustrates another sequence 1100 suitable for use as method 200. Similar to sequence 800 and sequence 900, sequence 1100 can include one or more carbon material deposition steps 1102 (n) and one or more treatment steps 1104. In accordance with examples of these embodiments, n can range from about 1 to about 50 and a combination of n deposition steps with one or more treatments steps can be N, where N ranges from about 1 to about 200 steps.

Sequence 1100 can include continuously supplying an inert gas to the reaction chamber during one or more carbon material deposition steps 1102 and/or one or more treatment steps 1104. In the illustrated example, the inert gas is provided to the reaction chamber for a pulse period 1106, which begins prior to a first deposition step 1102 and can end after the last treatment step 1104.

After pulse period 1106 is initiated, a carbon precursor is provided to the reaction chamber for a pulse period 1108. Pulse period 1108 can range from, for example, about 1.0 seconds to about 35.0 seconds. Each pulse period 1108 can be the same or vary in time.

After the flow of the carbon precursor to the reaction chamber has started, power to form a plasma is provided for a pulse period 1110. Thus, both the inert gas and the carbon precursor have been provided to the reaction chamber when the plasma is ignited/formed. Pulse period 1110 can range from, for example, about 1.0 second to about 30.0 seconds. Each pulse period 1110 can be the same or vary in time. The plasma power levels and frequencies and the precursor flowrate can be as described above.

As illustrated in this example, pulse period 1108 may cease after pulse 1110 ceases. Once the flow of the carbon precursor to the reaction chamber and the plasma power have ceased, the reaction chamber can be purged for a purge period. The purge period can range from, for example, about 1.0 seconds to about 30.0 seconds. Each purge period can be the same or vary in time.

After the step of treating the carbon material with activated species for one or more pulse periods 1104, the reaction chamber can be purged fora second purge period. The second purge period can range from, for example, about 1.0 seconds to about 70.0 seconds. Each second purge period can be the same or vary in time.

With reference to FIGS. 1 and 4 , after first carbon layer 304 is formed (e.g., using method 200 (e.g., with sequence 800, 900, or 1100)), method 100 proceeds to step 106 of forming the second carbon layer 402 to form a structure 400. Second carbon layer 402 can be formed (e.g., directly) overlying first carbon layer 304.

As noted above, method 200 (e.g., sequence 800, 900, or 1100) can be used to form second carbon layer 402. In accordance with examples of the disclosure, a treatment step of method 200 for the formation of second carbon layer 402 is such that second carbon layer 402 is less dense and/or exhibits a lower hardness, relative to first carbon layer 304. By way of examples, the density of the first carbon layer is greater than the density of the second carbon layer by about 10% to about 50%. A hardness of the first and/or second carbon layers can be controlled by, for example, selecting a number of od deposition steps (n) prior to one or more treatment steps and/or a time, power or electrode spacing during the respective deposition and treatment steps.

Once second carbon layer 402 is formed to a desired thickness, structure 400 can be exposed to one or more steps 108 and/or 110.

Step 108 can include etching second carbon layer 402 and/or first carbon layer 304. In accordance with examples of the disclosure, step 108 includes non-selectively etching second carbon layer 402 and the first carbon layer 304. As used herein, non-selectively etching, can mean that an etch rate of second carbon layer 402 is within about 10%, 5%, 2%, or 1% of an etch rate of first carbon layer 304.

As illustrated in FIG. 5 , once step 108 is completed, a structure 500 is formed. Structure 500 includes a first carbon layer 502 (remaining from first carbon layer 304) and a second carbon layer 504 (remaining from second carbon layer 402).

Step 108 may be performed in a different or same reaction chamber from steps 104 and/or 106. A pressure within the reaction chamber during step 108 can be less than 1000 Pa or range from about 100 Pa to about 1,300 Pa. A temperature within the reaction chamber during step 108 can range less than 100° C. A plasma power used during step 109 can be from about 200 W to about 4,000 W.

In accordance with further examples of the disclosure, step 108 can include ionic etching. In accordance with these examples, a plasma can be used to form excited species within the reaction chamber. An inert gas can be used to perform the ionic etching. For example, one or more of hydrogen and nitrogen, alone or mixed with one or more of argon and helium, can be used during step 108. By way of particular example, a mixture of hydrogen and argon (e.g., from about 20 to about 50 volumetric percent hydrogen and/or from about 50 to about 80 volumetric percent hydrogen) can be used to ionically etch first carbon layer 304 and second carbon layer 402.

To further smooth and/or flatten structure 500, a polishing step (e.g., CMP) can be used to remove or substantially remove second carbon layer 504 and a portion of first carbon layer 502 to form structure 600, illustrated in FIG. 6 . Structure 600 include a first carbon layer 602 that has been planarized using steps 108 and/or 110.

A third layer (e.g., a third carbon layer) can be formed overlying structure 500 and/or structure 600. A chemical composition of the third layer can be the same or similar to the composition of second carbon layer 402.

FIG. 7 illustrates a comparison of a first comparative example 702 using only a first carbon layer, a second comparative example using a first carbon layer and a second carbon layer formed using the same process conditions, and an example (example 1) in accordance with examples of the disclosure, using a first carbon layer and a second carbon layer, wherein a density of the first carbon layer is higher than a density of the second carbon layer. For each example, three positions on a substrate, having different features sizes and spacing, are illustrated.

For comparative example 1, first carbon layer 710 is deposited overlying features 708. As shown, the surface of first carbon layer 710 is relatively rough. For comparative example 2, first and second carbon layers were deposited overlying features 708. An etch was then performed, and a third carbon layer was deposited overlying the first and second carbon layers to form carbon material 712. All three carbon layers had the same or similar composition. As shown, the surface of first carbon layer 710 still is relatively rough. Finally, for the example in accordance with the disclosure, a first carbon layer and a second carbon layer (having a lower density than the first carbon layer) were deposited overlying features 708. An etch was then performed and a third carbon layer (e.g., having the same composition as the second carbon layer) was deposited to form carbon material 714. As illustrated, the surface of the resulting carbon material (formed using the first, second, and third carbon layers) is relatively smooth—even without use of a polishing process.

FIG. 10 illustrates a reactor system (sometimes referred to herein simply as system) 1000 in accordance with exemplary embodiments of the disclosure. Reactor system 1000 can be used to perform one or more steps or sub steps as described herein and/or to form one or more structures or portions thereof as described herein.

System 1000 includes a pair of electrically conductive flat-plate electrodes 4, 2 in parallel and facing each other in the interior 11 (reaction zone) of a reaction chamber 3. A plasma can be excited within reaction chamber 3 by applying, for example, HRF power (e.g., 13.56 MHz or 27 MHz) from power source 25 to one electrode (e.g., electrode 4) and electrically grounding the other electrode (e.g., electrode 2). A temperature regulator can be provided in a lower stage 2 (the lower electrode), and a temperature of a substrate 1 placed thereon can be kept at a desired temperature. Electrode 4 can serve as a gas distribution device, such as a shower plate. Reactant gas, dilution gas, if any, precursor gas, and/or the like can be introduced into reaction chamber 3 using one or more of a gas line 20, a gas line 21, and a gas line 22, respectively, and through the shower plate 4. Although illustrated with three gas lines, reactor system 800 can include any suitable number of gas lines. Gas line 20 can be coupled to a carbon precursor source 27, gas line 21 can be coupled to an inert gas source 28, and gas line 22 can be coupled to another gas source 29.

In reaction chamber 3, a circular duct 13 with an exhaust line 7 is provided, through which gas in the interior 11 of the reaction chamber 3 can be exhausted. Additionally, a transfer chamber 5, disposed below the reaction chamber 3, is provided with a seal gas line 24 to introduce seal gas into the interior 11 of the reaction chamber 3 via the interior 16 (transfer zone) of the transfer chamber 5, wherein a separation plate 14 for separating the reaction zone and the transfer zone is provided (a gate valve through which a wafer is transferred into or from the transfer chamber 5 is omitted from this figure). The transfer chamber is also provided with an exhaust line 6. In some embodiments, the deposition and treatment steps are performed in the same reaction space, so that two or more (e.g., all) of the (e.g., deposition, including treatment) steps can continuously be conducted without exposing the substrate to air or other oxygen-containing atmosphere.

In some embodiments, continuous flow of an inert or carrier gas to reaction chamber 3 can be accomplished using a flow-pass system (FPS), wherein a carrier gas line is provided with a detour line having a precursor reservoir (bottle), and the main line and the detour line are switched, wherein when only a carrier gas is intended to be fed to a reaction chamber, the detour line is closed, whereas when both the carrier gas and a precursor gas are intended to be fed to the reaction chamber, the main line is closed and the carrier gas flows through the detour line and flows out from the bottle together with the precursor gas. In this way, the carrier gas can continuously flow into the reaction chamber and can carry the precursor gas in pulses by switching between the main line and the detour line, without substantially fluctuating pressure of the reaction chamber.

A skilled artisan will appreciate that the apparatus includes one or more controller(s) 26 programmed or otherwise configured to cause one or more method steps as described herein to be conducted. The controller(s) are communicated with the various power sources, heating systems, pumps, robotics and gas flow controllers, or valves of the reactor, as will be appreciated by the skilled artisan. By way of examples, the controller can be configured to control gas flow of a carbon precursor into at least one of the one or more reaction chambers to form a first carbon layer and a second carbon layer overlying the first carbon layer, wherein a density of the first carbon layer is higher than a density of the second carbon layer.

In some embodiments, a dual chamber reactor (two sections or compartments for processing wafers disposed close to each other) can be used, wherein a reactant gas and a noble gas can be supplied through a shared line, whereas a precursor gas is supplied through unshared lines.

The example embodiments of the disclosure described above do not limit the scope of the invention, since these embodiments are merely examples of the embodiments of the invention. Any equivalent embodiments are intended to be within the scope of this invention. Indeed, various modifications of the disclosure, in addition to those shown and described herein, such as alternative useful combinations of the elements described, may become apparent to those skilled in the art from the description. Such modifications and embodiments are also intended to fall within the scope of the appended claims. 

What is claimed is:
 1. A method of forming a structure, the method comprising the steps of: providing a substrate within a reaction chamber, the substrate comprising one or more recesses formed on a surface of the substrate; forming a first carbon layer overlying the surface; and forming a second carbon layer overlying the first carbon layer, wherein the first carbon layer is formed by forming initially flowable material, wherein the first carbon layer fills the one or more recesses to a height above the surface of the substrate, and wherein a density of the first carbon layer is higher than a density of the second carbon layer.
 2. The method of claim 1, wherein at least one recess of the one or more recesses is formed between two features.
 3. The method of claim 2, wherein a height of the first carbon layer relative to the surface is greater than a height of the features relative to the surface.
 4. The method of claim 1, wherein the density of the first carbon layer is greater than the density of the second carbon layer by about 10% to about 50%.
 5. The method of claim 1, further comprising a step of chemical mechanical polishing the second carbon layer.
 6. The method of claim 1, further comprising a step of chemical mechanical polishing at least a portion of the first carbon layer.
 7. The method of claim 1, wherein a chemical mechanical polishing rate of the first carbon layer is lower than a chemical mechanical polishing rate of the second carbon layer.
 8. The method of claim 1, wherein the step of forming the first carbon layer comprises a plasma process.
 9. The method of claim 1, wherein the step of forming the second carbon layer comprises a plasma process.
 10. The method of claim 1, further comprising a plasma treatment step to treat the first carbon layer.
 11. The method of claim 1, further comprising a plasma treatment step to treat the second carbon layer.
 12. The method of claim 1, wherein a temperature within the reaction chamber during the step of forming the first carbon layer is less than 100° C.
 13. The method of claim 1, wherein a temperature within the reaction chamber during the step of forming the second carbon layer is less than 100° C.
 14. The method of claim 1, wherein the step of forming the second carbon layer comprises providing a carbon precursor to the reaction chamber, wherein a chemical formula of the carbon precursor is represented by C_(x)H_(y)N_(z), wherein x is a natural number of 2 or more, y is a natural number and z is 0 or a natural number.
 15. The method of claim 1, wherein the step of forming the first carbon layer comprises providing a carbon precursor to the reaction chamber, wherein a chemical formula of the carbon precursor is represented by C_(x)H_(y)N_(z), wherein x is a natural number of 2 or more, y is a natural number and z is 0 or a natural number.
 16. The method of claim 15, wherein the carbon precursor comprises a cyclic structure.
 17. The method of claim 16, wherein the cyclic structure comprises a double bond.
 18. The method of claim 1, further comprising a step of etching the second carbon layer.
 19. The method of claim 18, wherein a step of etching the first carbon layer and the step of etching the second carbon layer comprise ionic etching.
 20. The method of claim 1, further comprising a step of etching the first carbon layer.
 21. The method of claim 20, wherein the steps of etching the first carbon layer and a step of etching the second carbon layer comprise non-selectively etching the second carbon layer and the first carbon layer.
 22. The method of claim 1, wherein a hardness of the first carbon layer is higher than a hardness of the second carbon layer.
 23. The method of claim 1, further comprising a step of forming a third layer overlying the second carbon layer. 